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Inhomogeneity of photoacid generators in methacrylate-type ..:
Toriumi, Minoru
;
Itani, Toshiro
Japanese Journal of Applied Physics. 54 (2015) 6S1 - p. 06FE02 , 2015
Link:
https://doi.org/10.7567/jjap.54.06fe02
RT Journal T1 <Title>Inhomogeneity of photoacid generators in methacrylate-type EUV resist film studied by molecular dynamics simulations</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_jjap.54.06fe02&Exemplar=1&LAN=DE A1 Toriumi, Minoru A1 Itani, Toshiro PB IOP Publishing YR 2015 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 54 IS 6S1 SP 06FE02 LK http://dx.doi.org/https://doi.org/10.7567/jjap.54.06fe02 DO https://doi.org/10.7567/jjap.54.06fe02 SF ELIB - SuUB Bremen
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