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Surface characterization of 6H-SiC substrate irradiated by ..:
Miyagawa, Reina
;
Eryu, Osamu
Japanese Journal of Applied Physics. 54 (2015) 7 - p. 071302 , 2015
Link:
https://doi.org/10.7567/jjap.54.071302
RT Journal T1 <Title>Surface characterization of 6H-SiC substrate irradiated by femtosecond laser</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_jjap.54.071302&Exemplar=1&LAN=DE A1 Miyagawa, Reina A1 Eryu, Osamu PB IOP Publishing YR 2015 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 54 IS 7 SP 071302 LK http://dx.doi.org/https://doi.org/10.7567/jjap.54.071302 DO https://doi.org/10.7567/jjap.54.071302 SF ELIB - SuUB Bremen
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