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1 Ergebnisse
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Mass-selected ion beam study on etching characteristics of ..:
Li, Hu
;
Karahashi, Kazuhiro
;
Fukasawa, Masanaga
...
Japanese Journal of Applied Physics. 55 (2016) 2 - p. 021202 , 2016
Link:
https://doi.org/10.7567/jjap.55.021202
RT Journal T1 <Title>Mass-selected ion beam study on etching characteristics of ZnO by methane-based plasma</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_jjap.55.021202&Exemplar=1&LAN=DE A1 Li, Hu A1 Karahashi, Kazuhiro A1 Fukasawa, Masanaga A1 Nagahata, Kazunori A1 Tatsumi, Tetsuya A1 Hamaguchi, Satoshi PB IOP Publishing YR 2016 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 55 IS 2 SP 021202 LK http://dx.doi.org/https://doi.org/10.7567/jjap.55.021202 DO https://doi.org/10.7567/jjap.55.021202 SF ELIB - SuUB Bremen
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