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Mechanism of VHF H2 plasma production at high pressures:
Chen, Kuan-Chen
;
Chiu, Kuo-Feng
;
Chen, Chia-Fu
...
Japanese Journal of Applied Physics. 55 (2016) 6S2 - p. 06HA02 , 2016
Link:
https://doi.org/10.7567/jjap.55.06ha02
RT Journal T1 <Title>Mechanism of VHF H2 plasma production at high pressures</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_jjap.55.06ha02&Exemplar=1&LAN=DE A1 Chen, Kuan-Chen A1 Chiu, Kuo-Feng A1 Chen, Chia-Fu A1 Lien, Cheng-Yang A1 Tsai, Yu-Jer A1 Lien, Ting-Kuei A1 Ogiwara, Kohei A1 Uchino, Kiichiro A1 Kawai, Yoshinobu PB IOP Publishing YR 2016 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 55 IS 6S2 SP 06HA02 LK http://dx.doi.org/https://doi.org/10.7567/jjap.55.06ha02 DO https://doi.org/10.7567/jjap.55.06ha02 SF ELIB - SuUB Bremen
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