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1 Ergebnisse
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Oxygen additive amount dependence of rate of photoresist re..:
Yamamoto, Masashi
;
Umemoto, Hironobu
;
Ohdaira, Keisuke
...
Japanese Journal of Applied Physics. 55 (2016) 7 - p. 076503 , 2016
Link:
https://doi.org/10.7567/jjap.55.076503
RT Journal T1
Oxygen additive amount dependence of rate of photoresist removal by H radicals generated on a tungsten hot-wire catalyst
UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_jjap.55.076503&Exemplar=1&LAN=DE A1 Yamamoto, Masashi A1 Umemoto, Hironobu A1 Ohdaira, Keisuke A1 Shikama, Tomokazu A1 Nishiyama, Takashi A1 Horibe, Hideo PB IOP Publishing YR 2016 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 55 IS 7 SP 076503 LK http://dx.doi.org/https://doi.org/10.7567/jjap.55.076503 DO https://doi.org/10.7567/jjap.55.076503 SF ELIB - SuUB Bremen
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