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Proposal of the mechanism for inclination growth on a mesa ..:
Ishida, Yuuki
Japanese Journal of Applied Physics. 56 (2017) 7 - p. 070307 , 2017
Link:
https://doi.org/10.7567/jjap.56.070307
RT Journal T1 <Title>Proposal of the mechanism for inclination growth on a mesa top during the 4H-SiC trench filling epitaxy</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_jjap.56.070307&Exemplar=1&LAN=DE A1 Ishida, Yuuki PB IOP Publishing YR 2017 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 56 IS 7 SP 070307 LK http://dx.doi.org/https://doi.org/10.7567/jjap.56.070307 DO https://doi.org/10.7567/jjap.56.070307 SF ELIB - SuUB Bremen
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