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1 Ergebnisse
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Gas-permeable templates using cellulose derivatives with ac..:
Nakajima, Shinya
;
Takei, Satoshi
;
Takamatsu, Soichiro
...
Japanese Journal of Applied Physics. 57 (2018) 8 - p. 086503 , 2018
Link:
https://doi.org/10.7567/jjap.57.086503
RT Journal T1
Gas-permeable templates using cellulose derivatives with acrylate and methacrylate groups for reducing in void defect density in ultraviolet nanoimprint lithography
UL https://suche.suub.uni-bremen.de/peid=cr-10.7567_jjap.57.086503&Exemplar=1&LAN=DE A1 Nakajima, Shinya A1 Takei, Satoshi A1 Takamatsu, Soichiro A1 Mizui, Kento A1 Oka, Toshitaka A1 Matsumoto, Yoko A1 Sekiguchi, Atsushi A1 Hanabata, Makoto PB IOP Publishing YR 2018 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 57 IS 8 SP 086503 LK http://dx.doi.org/https://doi.org/10.7567/jjap.57.086503 DO https://doi.org/10.7567/jjap.57.086503 SF ELIB - SuUB Bremen
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