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Handbook of silicon wafer cleaning technology
Materials science & process technology series
Reinhardt, Karen A
;
Kern, Werner
- Third edition. . , 2018
Link:
https://www.sciencedirect.com/science/book/97803235108..
RT T1
Handbook of silicon wafer cleaning technology
UL https://suche.suub.uni-bremen.de/peid=elsevier-fc-1029054819&Exemplar=1&LAN=DE A1 Reinhardt, Karen A A1 Kern, Werner NO Third edition. PB William Andrew YR 2018 T3 Materials science & process technology series SN 9780323510851 SN 032351085X SN 9780323510844 SN 0323510841 K1 Silicon-on-insulator technology K1 Silicium sur isolant K1 TECHNOLOGY & ENGINEERING K1 Mechanical LK http://dx.doi.org/https://www.sciencedirect.com/science/book/9780323510844 DO https://www.sciencedirect.com/science/book/9780323510844 SF ELIB - SuUB Bremen
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