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1 Ergebnisse
1
Concept for Manufacturing a Microoptoelectromechanical Micr..:
, In:
2022 International Siberian Conference on Control and Communications (SIBCON)
,
Barbin, Evgenij S.
;
Nesterenko, Tamara G.
;
Koleda, Aleksej N.
... - p. 1-5 , 2022
Link:
https://doi.org/10.1109/SIBCON56144.2022.10002971
RT T1 <cTitle>2022 International Siberian Conference on Control and Communications (SIBCON)</cTitle>: T1 <Title>Concept for Manufacturing a Microoptoelectromechanical Micro-G Accelerometer</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10002971&Exemplar=1&LAN=DE A1 Barbin, Evgenij S. A1 Nesterenko, Tamara G. A1 Koleda, Aleksej N. A1 Shesterikov, Evgeniy V. A1 Kulinich, Ivan V. A1 Kokolov, Andrey YR 2022 SN 2380-6516 K1 Accelerometers K1 Waveguide transitions K1 Sensitivity K1 Waveguide lasers K1 Optical variables measurement K1 Dynamic range K1 Tunneling K1 MOEM-accelerometer K1 optical measuring transducer K1 mechanical sensing element K1 comb electrode structure K1 optical tunneling effect K1 optical coupling length SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/SIBCON56144.2022.10002971 DO https://doi.org/10.1109/SIBCON56144.2022.10002971 SF ELIB - SuUB Bremen
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