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1 Ergebnisse
1
Design a GA-based PID Controller for a Pressure Control of ..:
, In:
2022 22nd International Conference on Control, Automation and Systems (ICCAS)
,
Ryu, Seungwan
;
Yim, Sungsoon
;
Wi, Seokmin
... - p. 484-487 , 2022
Link:
https://doi.org/10.23919/ICCAS55662.2022.10003779
RT T1 <cTitle>2022 22nd International Conference on Control, Automation and Systems (ICCAS)</cTitle>: T1 <Title>Design a GA-based PID Controller for a Pressure Control of a Process Chamber using a Time-domain System Identification</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10003779&Exemplar=1&LAN=DE A1 Ryu, Seungwan A1 Yim, Sungsoon A1 Wi, Seokmin A1 Jung, Seungyun A1 Kim, Sanghoon A1 Kim, Byeonghee YR 2022 SN 2642-3901 K1 Semiconductor device modeling K1 Radio frequency K1 Process control K1 Transfer functions K1 Semiconductor device manufacture K1 Pressure control K1 System identification K1 Etcher K1 Process chamber K1 Gain scheduling K1 Genetic algorithm K1 PID controller SP 484 OP 487 LK http://dx.doi.org/https://doi.org/10.23919/ICCAS55662.2022.10003779 DO https://doi.org/10.23919/ICCAS55662.2022.10003779 SF ELIB - SuUB Bremen
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