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1
Piezoelectric Tantalum Aluminum Nitride Grown on Stainless ..:
, In:
2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)
,
Van Minh, Le
;
Kuwano, Hiroki
- p. 154-157 , 2022
Link:
https://doi.org/10.1109/PowerMEMS56853.2022.10007086
RT T1 <cTitle>2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)</cTitle>: T1 <Title>Piezoelectric Tantalum Aluminum Nitride Grown on Stainless Steel for Low-Frequency Vibration-Driven Energy Harvesters</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10007086&Exemplar=1&LAN=DE A1 Van Minh, Le A1 Kuwano, Hiroki YR 2022 K1 Vibrations K1 Power system measurements K1 Tantalum K1 Sensors K1 Steel K1 III-V semiconductor materials K1 Power generation K1 Ta-doped AlN K1 piezoelectric thin films K1 energy harvesters K1 Power MEMS SP 154 OP 157 LK http://dx.doi.org/https://doi.org/10.1109/PowerMEMS56853.2022.10007086 DO https://doi.org/10.1109/PowerMEMS56853.2022.10007086 SF ELIB - SuUB Bremen
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