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1
Towards a CMOS-Compatible Accelerometer Using Self-Powered ..:
, In:
2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)
,
Alzgool, Mohammad
;
Tian, Yu
;
Davaji, Benyamin
. - p. 192-194 , 2022
Link:
https://doi.org/10.1109/PowerMEMS56853.2022.10007574
RT T1 <cTitle>2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)</cTitle>: T1 <Title>Towards a CMOS-Compatible Accelerometer Using Self-Powered Teng System</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10007574&Exemplar=1&LAN=DE A1 Alzgool, Mohammad A1 Tian, Yu A1 Davaji, Benyamin A1 Towfighian, Shahrzad YR 2022 K1 Accelerometers K1 Voltage measurement K1 Sensitivity K1 Power measurement K1 Distance measurement K1 Sensor systems K1 Sensors K1 Triboelectric generator K1 accelerometer K1 self-powered K1 MEMS K1 Polyimide SP 192 OP 194 LK http://dx.doi.org/https://doi.org/10.1109/PowerMEMS56853.2022.10007574 DO https://doi.org/10.1109/PowerMEMS56853.2022.10007574 SF ELIB - SuUB Bremen
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