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1 Ergebnisse
1
Line Edge Roughness Optimization of Photonics Components in..:
, In:
2022 IEEE 24th Electronics Packaging Technology Conference (EPTC)
,
Sundaram, Arvind
;
Khang, Tew Chin
;
Wei, Tan Guo
... - p. 142-145 , 2022
Link:
https://doi.org/10.1109/EPTC56328.2022.10013128
RT T1
2022 IEEE 24th Electronics Packaging Technology Conference (EPTC)
: T1
Line Edge Roughness Optimization of Photonics Components in Electronics Photonics Heterogeneous Integration
UL https://suche.suub.uni-bremen.de/peid=ieee-10013128&Exemplar=1&LAN=DE A1 Sundaram, Arvind A1 Khang, Tew Chin A1 Wei, Tan Guo A1 Yu, HaiTao A1 Chandra Rao, B.S.S. A1 Singh, Navab YR 2022 K1 Waveguide transitions K1 Waveguide components K1 Lithography K1 Lighting K1 Multichip modules K1 Optimization methods K1 Coherence K1 Propagation losses K1 Plasmas K1 Photonics SP 142 OP 145 LK http://dx.doi.org/https://doi.org/10.1109/EPTC56328.2022.10013128 DO https://doi.org/10.1109/EPTC56328.2022.10013128 SF ELIB - SuUB Bremen
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