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Line Edge Roughness Optimization of Photonics Components in..:

, In: 2022 IEEE 24th Electronics Packaging Technology Conference (EPTC),
Sundaram, Arvind ; Khang, Tew Chin ; Wei, Tan Guo... - p. 142-145 , 2022
Link: https://doi.org/10.1109/EPTC56328.2022.10013128