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Effect of water film on 4H-SiC nano-indentation process:

, In: 2022 IEEE 24th Electronics Packaging Technology Conference (EPTC),
Zhou, Yuqi ; Huang, Yuhua ; Li, Jinming. - p. 481-485 , 2022
Link: https://doi.org/10.1109/EPTC56328.2022.10013179