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In-line test structures for yield improvement in MEMS/NEMS ..:

, In: 2022 IEEE 24th Electronics Packaging Technology Conference (EPTC),
Sharma, Jaibir ; Koh, Yul ; Ghosh, Sagnik.. - p. 242-245 , 2022
Link: https://doi.org/10.1109/EPTC56328.2022.10013245