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1 Ergebnisse
1
Aero Acoustic MEMS Microphone Integration in Ultra-Thin and..:
, In:
2022 IEEE 24th Electronics Packaging Technology Conference (EPTC)
,
Erbacher, Kolja
;
Marques, Joao Alves
;
von Krshiwoblozki, Malte
... - p. 15-18 , 2022
Link:
https://doi.org/10.1109/EPTC56328.2022.10013281
RT T1
2022 IEEE 24th Electronics Packaging Technology Conference (EPTC)
: T1
Aero Acoustic MEMS Microphone Integration in Ultra-Thin and Flexible Substrate
UL https://suche.suub.uni-bremen.de/peid=ieee-10013281&Exemplar=1&LAN=DE A1 Erbacher, Kolja A1 Marques, Joao Alves A1 von Krshiwoblozki, Malte A1 Wu, Lixiang A1 Ngo, Ha Duong A1 Schneider-Ramelow, Martin YR 2022 K1 Micromechanical devices K1 Wind tunnels K1 Lamination K1 Surfaces K1 Acoustics K1 Microphone arrays K1 Sensors SP 15 OP 18 LK http://dx.doi.org/https://doi.org/10.1109/EPTC56328.2022.10013281 DO https://doi.org/10.1109/EPTC56328.2022.10013281 SF ELIB - SuUB Bremen
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