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Line-profile and critical dimension measurements using a no..:

, In: 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259),
Yang, Weidong ; Lowe-Webb, R. ; Korlahalli, R.... - p. 119,120,121,122,123,124 , 2002