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Fabrication of Surface Grid by Method Interferential LCVD N..:

, In: 2022 IEEE International Multi-Conference on Engineering, Computer and Information Sciences (SIBIRCON),
Kuznetsov, Maksim V. ; Chesnokov, Dmitry V. ; Usubaliev, Nurlan A. - p. 1510-1514 , 2022
Link: https://doi.org/10.1109/SIBIRCON56155.2022.10017025