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Formation and characteristics of the Si-O-C-H composite fil..:

, In: PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference. Digest of Papers (Cat. No.01CH37251),
Kyoung Suk Oh ; Chi Kyu Choi ; Heon-Ju Lee.. - p. 1063,1064,1065 , 2001
Link: https://doi.org/10.1109/PPPS.2001.1001727