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Solid-state pulsed power module (SSPPM) design for a dense ..:
, In:
PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference. Digest of Papers (Cat. No.01CH37251)
,
Ness, R.M.
;
Partlo, W.N.
- p. 1268,1269,1270,1271 , 2001
Link:
https://doi.org/10.1109/PPPS.2001.1001779
RT T1
PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference. Digest of Papers (Cat. No.01CH37251)
: T1
Solid-state pulsed power module (SSPPM) design for a dense plasma focus (DPF) device for semiconductor lithography applications
UL https://suche.suub.uni-bremen.de/peid=ieee-1001779&Exemplar=1&LAN=DE A1 Ness, R.M. A1 Partlo, W.N. YR 2001 K1 Solid state circuits K1 Multichip modules K1 Plasma applications K1 Plasma density K1 Plasma devices K1 Lithography K1 Pulse power systems K1 Optical pulse generation K1 Plasma sources K1 Ultraviolet sources SP 1268,1269,1270,1271 LK http://dx.doi.org/https://doi.org/10.1109/PPPS.2001.1001779 DO https://doi.org/10.1109/PPPS.2001.1001779 SF ELIB - SuUB Bremen
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