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Lifetime and reliability data of commercial excimer laser p..:

, In: PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference. Digest of Papers (Cat. No.01CH37251),
Melcher, P. ; Johns, D. ; Ness, R.. - p. 1539,1540,1541,1542 , 2001