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1 Ergebnisse
1
A New Self-Powered Wireless Sensing Circuitry for On-Wafer ..:
, In:
2022 International Electron Devices Meeting (IEDM)
,
Lin, Wei-Hwa
;
Chen, Li Ci
;
Ho, Ming-Han
... - p. 31.5.1-31.5.4 , 2022
Link:
https://doi.org/10.1109/IEDM45625.2022.10019411
RT T1 <cTitle>2022 International Electron Devices Meeting (IEDM)</cTitle>: T1 <Title>A New Self-Powered Wireless Sensing Circuitry for On-Wafer In-Situ EUV Detection</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10019411&Exemplar=1&LAN=DE A1 Lin, Wei-Hwa A1 Chen, Li Ci A1 Ho, Ming-Han A1 Chen, Hong-Shen A1 Hu, Yu-Lun A1 Lin, Burn Jeng A1 Wu, Pin-Jiun A1 Liu, Jenny Yi-Chun A1 Chih, Yue-Der A1 Chang, Jonathen A1 Shih, Jiaw-Ren A1 Lin, Chrong Jung A1 King, Ya-Chin YR 2022 SN 2156-017X K1 Wireless communication K1 Wireless sensor networks K1 Spirals K1 Sensitivity K1 Voltage measurement K1 Ultraviolet sources K1 Metals SP 31.5.1 OP 31.5.4 LK http://dx.doi.org/https://doi.org/10.1109/IEDM45625.2022.10019411 DO https://doi.org/10.1109/IEDM45625.2022.10019411 SF ELIB - SuUB Bremen
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