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1 Ergebnisse
1
FinFETs with Thermally Stable RMG Gate Stack for Future DRA..:
, In:
2022 International Electron Devices Meeting (IEDM)
,
Capogreco, E.
;
Arimura, H.
;
Ritzenthaler, R.
... - p. 26.2.1-26.2.4 , 2022
Link:
https://doi.org/10.1109/IEDM45625.2022.10019422
RT T1 <cTitle>2022 International Electron Devices Meeting (IEDM)</cTitle>: T1 <Title>FinFETs with Thermally Stable RMG Gate Stack for Future DRAM Peripheral Circuits</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10019422&Exemplar=1&LAN=DE A1 Capogreco, E. A1 Arimura, H. A1 Ritzenthaler, R. A1 Brus, S. A1 Oniki, Y. A1 Dupuy, E. A1 Sebaai, F. A1 Radisic, D. A1 Chan, B. T. A1 Zhou, D. A1 Machkaoutsan, V. A1 Yoon, S. A1 Itokawa, H. A1 Yamaguchi, M. A1 Gao, Z. A1 Fazan, P. A1 Chen, Y. A1 Subramanian, S. A1 Ragnarsson, L.-A. A1 Spessot, A. A1 Litta, E. Dentoni A1 Horiguchi, N. YR 2022 SN 2156-017X K1 Ring oscillators K1 Silicon compounds K1 Temperature distribution K1 Annealing K1 Capacitors K1 Random access memory K1 Logic gates SP 26.2.1 OP 26.2.4 LK http://dx.doi.org/https://doi.org/10.1109/IEDM45625.2022.10019422 DO https://doi.org/10.1109/IEDM45625.2022.10019422 SF ELIB - SuUB Bremen
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