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BEOL-Compatible High-Performance a-IGZO Transistors with Re..:

, In: 2022 International Electron Devices Meeting (IEDM),
Li, Qijun ; Gu, Chengru ; Zhu, Shenwu... - p. 2.7.1-2.7.4 , 2022
Link: https://doi.org/10.1109/IEDM45625.2022.10019448