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First Demonstration of BEOL-Compatible Ultrathin AtomicLaye..:

, In: 2022 International Electron Devices Meeting (IEDM),
Zheng, D. ; Charnas, A. ; Anderson, J.... - p. 4.3.1-4.3.4 , 2022
Link: https://doi.org/10.1109/IEDM45625.2022.10019452