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1 Ergebnisse
1
First Demonstration of BEOL-Compatible 3D Fin-Gate Oxide Se..:
, In:
2022 International Electron Devices Meeting (IEDM)
,
Kong, Qiwen
;
Liu, Long
;
Zheng, Zijie
... - p. 12.3.1-12.3.4 , 2022
Link:
https://doi.org/10.1109/IEDM45625.2022.10019480
RT T1
2022 International Electron Devices Meeting (IEDM)
: T1
First Demonstration of BEOL-Compatible 3D Fin-Gate Oxide Semiconductor Fe-FETs
UL https://suche.suub.uni-bremen.de/peid=ieee-10019480&Exemplar=1&LAN=DE A1 Kong, Qiwen A1 Liu, Long A1 Zheng, Zijie A1 Sun, Chen A1 Kumar, Annie A1 Shao, Rui A1 Zhou, Zuopu A1 Jiao, Leming A1 Zhang, Jishen A1 Xu, Haiwen A1 Chen, Yue A1 Liu, Gan A1 Zhang, Dong A1 Wang, Xiaolin A1 Nguyen, Bich-Yen A1 Gong, Xiao YR 2022 SN 2156-017X K1 Annealing K1 Three-dimensional displays K1 Temperature K1 II-VI semiconductor materials K1 Field effect transistors K1 Capacitors K1 Logic gates K1 Oxide semiconductor K1 ZnO K1 Fe-FETs SP 12.3.1 OP 12.3.4 LK http://dx.doi.org/https://doi.org/10.1109/IEDM45625.2022.10019480 DO https://doi.org/10.1109/IEDM45625.2022.10019480 SF ELIB - SuUB Bremen
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