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First Demonstration of BEOL-Compatible 3D Fin-Gate Oxide Se..:

, In: 2022 International Electron Devices Meeting (IEDM),
Kong, Qiwen ; Liu, Long ; Zheng, Zijie... - p. 12.3.1-12.3.4 , 2022
Link: https://doi.org/10.1109/IEDM45625.2022.10019480