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A c-axis aligned crystalline IGZO FET and a 0.06-μm2 HfO2-b..:

, In: 2022 International Electron Devices Meeting (IEDM),
Endo, M. ; Numata, S. ; Ohshima, K.... - p. 6.6.1-6.6.4 , 2022
Link: https://doi.org/10.1109/IEDM45625.2022.10019506