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First Demonstration of Monolithic 3D Self-aligned GeSi Chan..:

, In: 2022 International Electron Devices Meeting (IEDM),
Tu, Chien-Te ; Liu, Yi-Chun ; Huang, Bo-Wei... - p. 20.3.1-20.3.4 , 2022
Link: https://doi.org/10.1109/IEDM45625.2022.10019532