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3D NAND Scaling in the next decade:

, In: 2022 International Electron Devices Meeting (IEDM),
Meyer, Russ ; Fukuzumi, Yoshiaki ; Dong, Yingda - p. 26.1.1-26.1.4 , 2022
Link: https://doi.org/10.1109/IEDM45625.2022.10019570