I agree that this site is using cookies. You can find further informations here.
X
Merkliste 
 1 Ergebnisse 
 
1

Deposition rate dependence of the 5 nm-thick ferroelectric ..:

, In: 2022 International Symposium on Semiconductor Manufacturing (ISSM),
Tanuma, Masakazu ; Shin, Joong-Won ; Ohmi, Shun-ichiro - p. 1-4 , 2022
Link: https://doi.org/10.1109/ISSM55802.2022.10026898