I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Nanoimprint Lithography with CO2 Ambient:
, In:
2022 International Symposium on Semiconductor Manufacturing (ISSM)
,
Ito, Toshiki
;
Ito, Yuto
;
Kawata, Isao
... - p. 1-5 , 2022
Link:
https://doi.org/10.1109/ISSM55802.2022.10027095
RT T1 <cTitle>2022 International Symposium on Semiconductor Manufacturing (ISSM)</cTitle>: T1 <Title>Nanoimprint Lithography with CO2 Ambient</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10027095&Exemplar=1&LAN=DE A1 Ito, Toshiki A1 Ito, Yuto A1 Kawata, Isao A1 Ueyama, Ken-ichi A1 Nagane, Kouhei A1 Liu, Weijun A1 Stachowiak, Timothy A1 Zhang, Wei A1 Estrada, Teresa YR 2022 K1 Liquids K1 Carbon dioxide K1 Resists K1 Semiconductor device manufacture K1 Throughput K1 Solids K1 Nanolithography K1 Nanoimprint K1 Lithography K1 Photoresist K1 Helium SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/ISSM55802.2022.10027095 DO https://doi.org/10.1109/ISSM55802.2022.10027095 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)
