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RF figures of merit of polysilicon trap-rich layers formed ..:

, In: 2023 IEEE 23rd Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems,
Perrose, M. ; Alba, P. Acosta ; Moulin, M.... - p. 25-27 , 2023
Link: https://doi.org/10.1109/SiRF56960.2023.10046145