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1 Ergebnisse
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Automation methodology of local defocus monitoring on fixed..:
, In:
2023 International Conference on Electronics, Information, and Communication (ICEIC)
,
Shin, Taesoo
;
Ok, Seulgi
;
Lee, Kibum
. - p. 1-3 , 2023
Link:
https://doi.org/10.1109/ICEIC57457.2023.10049963
RT T1 <cTitle>2023 International Conference on Electronics, Information, and Communication (ICEIC)</cTitle>: T1 <Title>Automation methodology of local defocus monitoring on fixed chips in semiconductor fabrication</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10049963&Exemplar=1&LAN=DE A1 Shin, Taesoo A1 Ok, Seulgi A1 Lee, Kibum A1 Hwang, Sungwook YR 2023 SN 2767-7699 K1 Fabrication K1 Productivity K1 Automation K1 Surface contamination K1 Lithography K1 Process control K1 Semiconductor device manufacture K1 local defocus monitoring K1 wafer backside K1 early detection SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/ICEIC57457.2023.10049963 DO https://doi.org/10.1109/ICEIC57457.2023.10049963 SF ELIB - SuUB Bremen
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