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1 Ergebnisse
1
A Reliable Release Method for A Back-End-Of-Line Nems Switc..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Kim, Tae-Soo
;
Lee, Yong-Bok
;
Lee, So-Young
.. - p. 76-79 , 2023
Link:
https://doi.org/10.1109/MEMS49605.2023.10052124
RT T1 <cTitle>2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>A Reliable Release Method for A Back-End-Of-Line Nems Switch of A Monolithic Three-Dimensional Integrated Cmos-Nems Circuit</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10052124&Exemplar=1&LAN=DE A1 Kim, Tae-Soo A1 Lee, Yong-Bok A1 Lee, So-Young A1 Lee, Seung-Jun A1 Yoon, Jun-Bo YR 2023 SN 2160-1968 K1 Silicon compounds K1 Water K1 Nanoelectromechanical systems K1 Surface resistance K1 Switches K1 Etching K1 Surface roughness K1 Reliable Release Method K1 Monolithic Three-Dimensional Integrated CMOS-NEMS Circuit K1 Aluminum Back-End-Of-Line NEMS Switch SP 76 OP 79 LK http://dx.doi.org/https://doi.org/10.1109/MEMS49605.2023.10052124 DO https://doi.org/10.1109/MEMS49605.2023.10052124 SF ELIB - SuUB Bremen
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