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3d Self-Aligned Fabrication of Suspended Nanowires by Cryst..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Berenschot, Erwin J.W. ; Pordeli, Yasser ; Kooijman, Lucas J.... - p. 639-642 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052139