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High-Q and Low-Motional Impedance Piezoelectric mems Resona..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Huang, Linhai ; Feng, Zhihong ; Xiao, Yuhao.. - p. 1159-1162 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052210