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Microsystem Vibrating Mesh Atomizer With Integrated Microhe..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Sharma, Pallavi ; Vazquez, Irma Rocio ; Jackson, Nathan - p. 467-470 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052232