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1 Ergebnisse
1
A New Finding on Nonlinear Damping and Stiffness of Flexura..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Chen, Hung-Yu
;
Li, Ming-Huang
;
Li, Sheng-Shian
- p. 526-529 , 2023
Link:
https://doi.org/10.1109/MEMS49605.2023.10052284
RT T1 <cTitle>2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>A New Finding on Nonlinear Damping and Stiffness of Flexural Mode Capacitive MEMS Resonators</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10052284&Exemplar=1&LAN=DE A1 Chen, Hung-Yu A1 Li, Ming-Huang A1 Li, Sheng-Shian YR 2023 SN 2160-1968 K1 Damping K1 Micromechanical devices K1 Force measurement K1 Force K1 Electrostatic measurements K1 Resonant frequency K1 Behavioral sciences K1 CMOS K1 MEMS K1 capacitive transduction K1 resonator K1 electromechanical coupling K1 nonlinearity SP 526 OP 529 LK http://dx.doi.org/https://doi.org/10.1109/MEMS49605.2023.10052284 DO https://doi.org/10.1109/MEMS49605.2023.10052284 SF ELIB - SuUB Bremen
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