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Programmable Ferroelectric HZO NEMS Mechanical Multiplier f..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Jadhav, Shubham ; Gund, Ved ; Lal, Amit - p. 519-521 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052285