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A CMOS Compatible Micro Pirani Gauge with Structure Optimiz..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Jiao, Rui ; Yang, Gai ; Wang, Ruoqin... - p. 752-755 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052309