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A Piezoelectric MEMS Speaker with Stretchable Film Sealing:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Xu, Linbing ; Sun, Mingchao ; Zhang, Menglun... - p. 673-676 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052314