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1 Ergebnisse
1
CMOS-Embedded 3D Micro/Nanofluidics Employing Top-Down Beol..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Weng, Wei-Yang
;
Hou, Hung-Yu
;
Chao, Yueh-Jung
.. - p. 558-561 , 2023
Link:
https://doi.org/10.1109/MEMS49605.2023.10052329
RT T1 <cTitle>2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>CMOS-Embedded 3D Micro/Nanofluidics Employing Top-Down Beol Single-Step Wet-Etching Technique</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10052329&Exemplar=1&LAN=DE A1 Weng, Wei-Yang A1 Hou, Hung-Yu A1 Chao, Yueh-Jung A1 Liaw, Shwu-Jen A1 Chien, Jun-Chau YR 2023 SN 2160-1968 K1 Three-dimensional displays K1 Microorganisms K1 Metallization K1 Point of care K1 CMOS technology K1 Shift registers K1 Nanofluidics K1 CMOS K1 microfluidics K1 nanofluidics K1 top-down BEOL etching K1 cellular detection K1 resistive pulse sensing SP 558 OP 561 LK http://dx.doi.org/https://doi.org/10.1109/MEMS49605.2023.10052329 DO https://doi.org/10.1109/MEMS49605.2023.10052329 SF ELIB - SuUB Bremen
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