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An ALSCN PMUT-on-CMOS Sensor for Monitoring Fluids' Density..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Ledesma, Eyglis ; Zamora, Ivan ; Yanez, Jesus.. - p. 937-940 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052334