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A Large-Stroke Tip-Tilt-Piston Micromirror with Electromagn..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Ou, Chuan-Hui ; Toan, Nguyen V. ; Ono, Takahito - p. 1103-1106 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052335