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Leveraging Semiconductor Ecosystems to MEMS:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Fang, Weileun ; Li, Sheng-Shian ; Li, Ming-Huang - p. 143-148 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052342