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1 Ergebnisse
1
Temperature Dependence of Quality Factors at High Frequenci..:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Schiwietz, Daniel
;
Weig, Eva M.
;
Degenfeld-Schonburg, Peter
- p. 877-880 , 2023
Link:
https://doi.org/10.1109/MEMS49605.2023.10052368
RT T1
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
: T1
Temperature Dependence of Quality Factors at High Frequencies in MEMS Gyroscopes
UL https://suche.suub.uni-bremen.de/peid=ieee-10052368&Exemplar=1&LAN=DE A1 Schiwietz, Daniel A1 Weig, Eva M. A1 Degenfeld-Schonburg, Peter YR 2023 SN 2160-1968 K1 Temperature measurement K1 Q-factor K1 Micromechanical devices K1 Damping K1 Temperature dependence K1 Temperature distribution K1 Simulation K1 MEMS gyroscopes K1 numerical modelling K1 thermoelastic damping K1 quality factors SP 877 OP 880 LK http://dx.doi.org/https://doi.org/10.1109/MEMS49605.2023.10052368 DO https://doi.org/10.1109/MEMS49605.2023.10052368 SF ELIB - SuUB Bremen
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