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Enhanced Stiffness Sensitivity in a Mode Localized Sensor U..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Chen, Jianlin ; Zhang, Hemin ; Tsukamoto, Takashiro.. - p. 865-868 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052378