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High-Crystallinity 30% Scaln Enabling High Figure of Merit ..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Giribaldi, Gabriel ; Simeoni, Pietro ; Colombo, Luca. - p. 169-172 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052384