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1 Ergebnisse
1
A 3D-Printed Functional MEMS Accelerometer:
, In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Pagliano, Simone
;
Marschner, David E.
;
Maillard, Damien
... - p. 594-597 , 2023
Link:
https://doi.org/10.1109/MEMS49605.2023.10052385
RT T1 <cTitle>2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>A 3D-Printed Functional MEMS Accelerometer</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10052385&Exemplar=1&LAN=DE A1 Pagliano, Simone A1 Marschner, David E. A1 Maillard, Damien A1 Ehrmann, Nils A1 Stemme, Goran A1 Braun, Stefan A1 Villanueva, Luis Guillermo A1 Niklaus, Frank YR 2023 SN 2160-1968 K1 Micromechanical devices K1 Accelerometers K1 Three-dimensional displays K1 Transducers K1 Resonant frequency K1 Production K1 Three-dimensional printing K1 3D printing K1 two-photon polymerization K1 shadow masking K1 strain gauge transducer K1 Laser Doppler Vibrometer K1 custom MEMS K1 low-volume manufacturing SP 594 OP 597 LK http://dx.doi.org/https://doi.org/10.1109/MEMS49605.2023.10052385 DO https://doi.org/10.1109/MEMS49605.2023.10052385 SF ELIB - SuUB Bremen
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