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Silicon Carbide-on-Insulator Thermal-Piezoresistive Resonat..:

, In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS),
Sun, Baoyun ; Mo, Jiarui ; Zhang, Hemin... - p. 621-624 , 2023
Link: https://doi.org/10.1109/MEMS49605.2023.10052401